发明名称 TEST HEAD COOLING MECHANISM
摘要 PURPOSE:To improve cooling effect and dust removal effect without varying the capacity of a housing nor the size of a fan by composing a holed cylinder body of a holed internal cylinder and a holed external cylinder and interposing a dust removing member between those internal and external cylinders. CONSTITUTION:This mechanism has the holed cylinder body 10 for external cooling air suction and the suction fan 20 arranged adjacently to the cylinder body 10; and the cylinder body 10 is joined with the housing 30 and the an 20 is also fixed to the housing by a fitting plate 20. The cylinder body 10 consists of the holed internal cylinder 12 and holed external cylinder 14 and the dust removing member 16 is interposed between the internal cylinder 12 and external cylinder 14. At least part of the hole of the internal cylinder 12 is arranged while shifting in position from the hole of the external cylinder 14 and then the outside air which is blown is diffused uniformly to improve the cooling effect and also increase the in-use dust removal area of the dust removing member 16, thereby improving the dust removal effect as well.
申请公布号 JPS62223678(A) 申请公布日期 1987.10.01
申请号 JP19860068004 申请日期 1986.03.26
申请人 HITACHI ELECTRONICS ENG CO LTD 发明人 TSUYUKI SHOJI
分类号 H01L21/66;G01R31/28 主分类号 H01L21/66
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