发明名称 CHEMICAL VAPOR DEPOSITION OF TITANIUM NITRIDE AND LIKE FILMS
摘要 A novel process for placing a thin film of a metal nitride, e.g. titanium nitride, on a glass substrate (10) by mixing a metal halide with a reducing gas like ammonia, preferably within a range of from about 250<o>C to 320<o>C, and then reacting the gases at (18) the surface of a glass substrate heated to, e.g., about 400<o>C to about 700<o>C to form the film on the glass.
申请公布号 AU565957(B2) 申请公布日期 1987.10.01
申请号 AU19830022698 申请日期 1983.10.28
申请人 GORDON, R.G. 发明人 GORDON,R.G.
分类号 C03C17/22;C23C16/34;G02B1/10 主分类号 C03C17/22
代理机构 代理人
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