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摘要
申请公布号
DE3504936(C2)
申请公布日期
1987.10.01
申请号
DE19853504936
申请日期
1985.02.13
申请人
T.I. (GROUP SERVICES) LTD., BIRMINGHAM, GB
发明人
DAVENPORT, JOHN, CAMBRIDGE, GB;RUSSO, MICHAEL ANGELO, TREVOSE, PA., US
分类号
G05F1/10;C23C8/36;C23C14/54;C23C16/52;G01Q30/08;G01Q30/16;H01J37/32;(IPC1-7):C23C16/52
主分类号
G05F1/10
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代理人
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