| 摘要 |
PURPOSE:To form a transparent electrically-conductive film having excellent characteristics in case of forming the transparent electrically-conductive film in a solar cell by incorporating both a base plate and a material of the transparent electrically-conductive film to be formed thereon in a vacuum vessel and evaporating the material of the transparent electrically-conductive film by projection of laser beams and vacuum vapor-depositing it on the base plate. CONSTITUTION:In case of production of a solar cell, both a glass plate 1 and a crucible 4 incorporated with a material 5 for a transparent electrically- conductive film are introduced into the inside of a vacuum vessel 2 and the inside thereof is regulated to <=2X10<-6>Torr degree of vacuum by an exhaust system. The glass base plate 1 is heated at 100-500 deg.C by a heater 3 and laser beams fed from a laser beam source 8 are projected on In2O3, ITO and SnO2 as the material 5 via a light guide 9. The material 5 is heated and evaporated by projection of laser beams and vapor-deposited on the glass base plate 1. The transparent electrically-conductive film excellent in transmittance together with specific resistance is formed on the glass base plate 1.
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