发明名称 SEMICONDUCTOR DEVICE
摘要 PURPOSE:To prevent the generation of voids when a semiconductor device is mounted onto a vessel metallic plate by using a hard solder agent by miniaturizing the stepped section of a recessed section in the back surface of a semiconductor element and smoothing the whole back surface. CONSTITUTION:A section to which a via-hole must be formed is etched when a surface pattern is prepared and a recessed section is shaped onto the surface, and a surface metal 1 is applied previously to the recessed section. After a surface pattern is completed, the section of the recessed section formed previously onto the surface is also etched from the back surface, a recessed section in an extent that it reaches a surface metallic layer is shaped, and a back metal 3 is applied, and brought electrically into contact with the surface metal. The back metal is plated thickly with Au 4, thus miniaturizing the stepped section of the recessed section on the back, then smoothing the whole back surface.
申请公布号 JPS62222656(A) 申请公布日期 1987.09.30
申请号 JP19860067833 申请日期 1986.03.25
申请人 NEC CORP 发明人 SATO HIROYUKI
分类号 H01L23/52;H01L21/306;H01L21/3205 主分类号 H01L23/52
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