| 摘要 |
PURPOSE:To obtain the titled apparatus having good measuring accuracy and a small dimension and convenient to handle, by providing a detection coil for detecting the distance between the heat conductive member on the outer peripheral surface of a processing nozzle and a material to be processed and a coil for compensating the temp. of said coil. CONSTITUTION:A processing head 11 thermally cutting a material W to be processed is provided to a laser processing machine 1 and a processing nozzle 23 arranged on the center line of said head 11 permits the passage of laser beam. The distance between the nozzle 23 and the material W is measured for the purpose of following control making said distance constant. The sensor 21 mounted to the outside of the nozzle 23 is constituted of an inside member 21b having good heat conductivity, an outside member 21c, a detection coil C1 embedded in the outside of the member 21b and a coil C2 for compensating temp. The distance between the material W and the nozzle 23 is measured by an eddy current type distance detection electric circuit connected to the coils C1, C2. |
