发明名称 Grading orientation errors in crystal specimens.
摘要 <p>The invention comprises a method of, and apparatus for, measuring the orientation error in a single crystal. An X-ray beam is reflected from the surface of the crystal while it is rotated, and the orientation error is determined from the figure traced at a detector by the reflected beam. The orientation error may be calculated from the major axes of the traced figure, or, if the X-ray beam contains a characteristic line, from the separation of the two bright spots produced in the traced figure.</p>
申请公布号 EP0239260(A2) 申请公布日期 1987.09.30
申请号 EP19870301860 申请日期 1987.03.04
申请人 HOWE, STEPHEN;ROGERS, DONALD 发明人 HOWE, STEPHEN
分类号 H01L21/205;C30B25/16;G01N23/207;(IPC1-7):G01N23/207 主分类号 H01L21/205
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