| 摘要 |
PURPOSE:To form a high-performance vertically magnetized film by forming a Co-Cr alloy contg. Cr at a prescribed weight ratio to a thin film state in a manner as to have vertical magnetic anisotropy and forming an oxide film of Co-Cr contg. Cr at a specific weight ratio to a finely crystalline and amorphous hybrid state. CONSTITUTION:The thin Co-Cr alloy film contg., for example, 16-24% Cr by weight is formed on a nonmagnetic substrate consisting of PET, etc., in a manner as to have the vertical magnetic anisotropy. The oxide film of Co-Cr contg., for example, 15-65% Cr by weight is so formed as to have the finely crystalline and amorphous hybrid state, Such finely crystalline and amorphous hybrid state is formed by depositing the oxide film of Co-Cr under the oxygen partial pressure at the point where, for example, satd. magnetization is zero at the time of increasing the oxygen partial pressure in the stage of sputtering Co-Cr from zero on the oxygen partial pressure versus satd. magnetization characteristic curve of the oxide film of Co-Cr deposited on the nonmagnetic substrate or under the oxygen partial pressure up to the value of about 3 times said oxygen partial pressure. The durability and weatherability are thereby improved and the deterioration in the characteristics by a protective film is decreased.
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