发明名称 PRODUCTION OF MEMBER DEPOSITED WITH CERAMICS
摘要 PURPOSE:To produce a member having excellent wear resistance at a low cost by subjecting a base material essentially consisting of iron and contg. a specific ratio of C to a pretreatment in a plasma atmosphere of an Ar-contg. gas, then forming a ceramic layer on the intermediate layer. CONSTITUTION:The base material 10 essentially consisting of the iron and contg. >=0.05wt% C is worked to a prescribed shape and is suspended by a supporting member 11 in a reaction chamber 1. A matching box 15 and the supporting member 11 are connected, and after the inside of the reaction chamber 1 is evacuated, gaseous Ar is introduced into the reaction chamber from an introducing port 3 and is maintained under a prescribed pressure. Electric power is supplied from a power source 13 to a heater 12 to heat the base material 10 to about 150-300 deg.C and high-frequency electric power is impressed from a power source 14 to the base material 10 to generate plasma between the base material and an electrode 4. The C in the base material 10 is, therefore, once driven out from the base material to bring the C and the iron on the surface of the base material 10 into reaction with each other to form the intermediate layer having the higher concn. of carbon than in the base material on the surface of the base material 10. A gas contg. ceramic constituting elements is then introduced into the reaction chamber 1 and the connection of the matching box 15 is changed over to the reaction chamber 1, by which the ceramic layer is formed on the base material 10.
申请公布号 JPS62222067(A) 申请公布日期 1987.09.30
申请号 JP19860063233 申请日期 1986.03.20
申请人 TOSHIBA CORP 发明人 YAMAZAKI MUTSUKI
分类号 C23C14/02;C23C14/06;C23C14/08;C23C16/02;C23C16/32;C23C16/34;C23C16/36;C23C16/40;C23C16/50 主分类号 C23C14/02
代理机构 代理人
主权项
地址
您可能感兴趣的专利