| 摘要 |
PURPOSE:To effectively utilize the inside of a clean room by arranging case bodies of SMIF pods right above cassette mounting positions in two positions and providing a mechanism for moving the bottom plate of the pod up and down between said mounting position and pod. CONSTITUTION:Mounting positions of a semiconductor wafer cassette 6 are arranged in two positions, a loading position 11 and an unloading position 12, in the inside of a semiconductor manufacturing equipment 1 installed in a clean room. At the top of the equipment 1, a clean air supply device 3 is arranged, and SMIF pod mounting parts 13 are arranged right above the positions 11 and 12. In the mounting part 13, a cassette 6 for containing a predetermined number of semiconductor wafers 7 and a SMIF pod 8 composed of a case body and a bottom plate which can be detached freely are placed. The bottom plate of the pod 8 is reciprocated between the position 11 or 12 and the mounting part 13 by an elevating mechanism 20 so as to transport the cassette 6.
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