| 摘要 |
PURPOSE:To easily form carbon films having superior wear resistance and insulation, oxidation, moisture and weather resistances in a short time by carrying out sputtering with glassy carbon as a target and gaseous Ar or H2 as a sputtering gas. CONSTITUTION:When various carbon films such as a wear resistant insulating layer, an oxidation inhibiting layer, moisture and weather resistant layers are formed on the surfaces of electronic parts by sputtering, high frequency or DC sputtering is carried out with glassy carbon as a target and at least one between gaseous Ar and H2 as a sputtering gas. A wear resistant insulating carbon film having high hardness and carbon films having superior characteristics as oxidation, moisture and weather resistant layers can be formed in a short time.
|
