| 摘要 |
PURPOSE:To quickly and exactly measure the temp. of the material in a crucible used in a cluster ion beam device by providing heat resistant light transmissive windows to said crucible, passing lasers through said windows and detecting the change of the oscillation frequency before and after the passage of the layers through the inside of the crucible. CONSTITUTION:ZrO2 powder added with Y2O3 is hot-pressed to fashion a crucible shape 15 and the small-diameter windows are provided to a cap 11 having a nozzle thereof in the positions where the windows face each other. Window panes 14 consisting of heat-resistant glass such as quartz are attached to the windows. A raw material 17 such as Bi2O3 is put into the crucible 15 and part thereof is evaporated so as to be suspended in the space in the crucible. Two pieces of dye laser (monochromatic light) 12 and dye laser (broad band) 13 are introduced from one of the quartz glass panes 14 to irradiate the Bi2O3 vapor. Coherent anti-Stokes Raman light 16 is generated from the intersected part thereof and the intensity ratio of the wave number components of the Raman light is detected, by which the temp. of the Bi2O3 in the crucible is quickly and exactly measured. |
