发明名称 Chemical vapor deposition method of producing fluorine-doped tin oxide coatings
摘要 In accordance with the invention, there is provided herein an improved chemical vapor deposition method for forming fluorine-doped tin oxide coatings using a liquid coating composition which includes a reactive organic fluorine dopant and an organotin compound. The method is carried out under a defined set of process conditions such that the coating produced has a minimum and constant sheet resistance which is substantially independent of deposition temperature.
申请公布号 US4696837(A) 申请公布日期 1987.09.29
申请号 US19850797364 申请日期 1985.11.12
申请人 M&T CHEMICALS INC. 发明人 LINDNER, GOERG H.
分类号 C03C17/245;C23C16/40;(IPC1-7):C23C16/40 主分类号 C03C17/245
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