| 摘要 |
PURPOSE:To measure flatness at a narrow place by fitting one or >=2 position detectors to a base body having a reference plane and moving this reference plane in a contact state with the surface to be measured. CONSTITUTION:Position sensors 3A, 3B, 3C and 3D are distributionally provided to the base body 1 and respective tips are provided with probes 4A, 4B, 4C and 4D. The reference plane 2 of the base body 1 is in contact with the surface 6 to be measured of an object 5 to be measured and the base body 1 is moved extending over a prescribed area on the object 5 to be measured together with the position sensors 3A, 3B, 3C and 3D as the contact state is maintained. The position sensors 3A, 3B, 3C and 3D are moved on the surface 6 to be measured and a maximum value of intervals between the reference plane 2 and the surface 6 to be measured detected at the respective positions indicates the flatness.
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