Oxygen separating member and process for producing the same

摘要

An invention relates to an oxygen separating member including a composite membrane made of a porous substrate and an organopolysiloxane film formed on the surface of the substrate. A fluorine-containing organic compound is chemically in the organopolysiloxane film. The process for producing an oxygen separating member comprising a composite membrane having an organopolysiloxane film formed on the surface of a porous substrate includes exposing the film in an inert gas plasma to produce radical active sites in the organopolysiloxane film, and then contacting it with a gaseous fluorine-containing organic compound containing a radical polymerization group to form a chemical linkage between said organopolysiloxane and fluorine-containing compound.