发明名称 PHOTORESIST STRIPPER COMPOSITION AND PROCESS OF USE
摘要 A composition, adapted to strip photoresists from substrates after the protective function of the photoresist has been completed, comprises a mixture of (a) morpholine or an N-alkyl or N-hydroxyalkylmorpholine and (b) pyrrolidone or an N-alkyl or N-hydroxyalkylpyrrolidone in a ratio by weight of (a) to (b) of about 4:1 to about 0.25:1. The composition is effective in stripping, rapidly and completely, a wide variety of photoresists at room temperature or at elevated temperatures below the flash point of the composition.
申请公布号 AU7163187(A) 申请公布日期 1987.09.28
申请号 AU19870071631 申请日期 1987.02.27
申请人 MACDERMID, INC., 发明人 EDWIN J. TURNER
分类号 C09D9/00;G03F7/42 主分类号 C09D9/00
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