| 摘要 |
PURPOSE:To conduct an effective cooling and enable a stable glow discharge to be performed by arranging a pin-like electrode constituted by a curled portion, an extending portion and a support in a gas flow so that the extending portion intersects the gas flow perpendicularly thereto. CONSTITUTION:Each of a number of pin-like electrodes 13 provided in a zigzag arrangement is formed with a curled portion 13A wherein the distal end portion of a wire rod is rolled in an approximately circular shape and with a support 13C of a prescribed length by bending the base portion of an extending portion 13B in an L-shape. The extending portion 13B is planted on a substrate 23 so as to intersect a gas flow A perpendicularly thereto. The support 13C penetrates an insulating substrate 23A and the rear end of the support 13C is connected to a ballast capacitor 25 in a molded portion 23B. The capacitor 25 is connected to a power supply line 5. Thus, the pin-like electrodes 13 are sufficiently cooled, no long turbulent flow is generated and the discharge electrodes can perform a uniform and stable glow discharge due to the zigzag arrangement of the pin-like electrodes. |
