PRINTED CIRCUIT BOARD DEFECT INSPECTING DEVICE

摘要

PURPOSE:To achieve a higher inspection accuracy of a pattern defect, by forming an image of parallel beam fluxes as obtained from two or more collimators on a printed circuit board to detect fluorescence generated therefrom with the image formation. CONSTITUTION:Parallel beam fluxes R1 and R2 as obtained from collimator lens systems 13 and 14 and respectively reflected with flat mirrors 15 and 16 are reflected by respective flat mirrors 17 and 18. Thereafter, the beam fluxes are made incident into a primary mirror 19a of a Cassegrain mirror 19 and reflected by the primary mirror 19a and a secondary mirror 19b to form an image at the same point on the printed circuit board 6. Fluorescence generated from the circuit board 6 with the image formation forms an image on a CCD9 via a dichroic mirror 7 and a condenser lens 8. A signal generated from the CCD9 is applied to an inspection processing circuit through an pre-amplifier 10. Thus, a higher inspection accuracy is achieved with a greater illuminance of an exciting light.