| 摘要 |
PURPOSE:To simplify a sputtering device which is a film forming device by using the magnetic layers consisting of the same alloy to form a soft magnetic layer and a vertical magnetic recording layer of a two-layered vertical magnetic recording medium. CONSTITUTION:The conditions for forming the soft magnetic layer 2 are 16w/cm<2> throwing electric power, 0.06Torr argon pressure and room temp. for substrate temp. (in actuality, a substrate holder is cooled with water) under <=7.0X10<-7>Torr ultimate vacuum degree and the film is formed to about 0.5mum film thickness. The conditions for forming the vertical magnetic recording layer 1 are 16w/cm<2> throwing electric power, 0.1Torr argon pressure and 250 deg.C substrate temp. likewise under <=7.0X10<-7>Torr ultimate vacuum degree and the film is formed to about 0.3mum film thickness. More specifically, the soft magnetic layer and vertical magnetic recording layer of the two-layered vertical magnetic recording medium are formed of substantially the same target, by which the simplification of the film forming device and the decrease of the stages are made possible.
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