发明名称 PELLET BONDER
摘要 PURPOSE:To allow both a base and pellet to have a close contact with each other and accomplish a favorable pellet bonding even though the pellet is on a slant to the base by installing a flexible coupling part between a bonding arm and collet. CONSTITUTION:A pellet bonder 1 is equipped with a bonding arm 2 which is coupled with a drive mechanism and is reciprocated back and forth and also with a collet 3 which is attached to the tip of the bonding arm 2. In addition, the collet 3 is attached to a tip position of its bonding arm 2 by means of a stem 6 installed by a flexible part 5 made of a rubber and its flexibility of the flexible part 5 allows the collet 3 to oscillate in every direction at a minute angle. Even if a lead frame 11 and a pellet 12 are on a slant, the flexibility of this coupling part 5 permits the pellet 12 to be adapted to the lead frame 11 and to gain the favorable bonding after making the foregoing pellet and lead frame closely contact each other.
申请公布号 JPS62219626(A) 申请公布日期 1987.09.26
申请号 JP19860060515 申请日期 1986.03.20
申请人 HITACHI LTD 发明人 OKIKAWA SUSUMU;HAJIME TETSUO;MIMATA TSUTOMU
分类号 H01L21/52;H01L21/67;H01L21/677;H01L21/68 主分类号 H01L21/52
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