| 摘要 |
<p>PURPOSE:To enable forming a high density multichannel coil without requiring to assemble the coil by handworks by forming the coil of a rotary transformer on one surface of a disk like magnetic material by plating and etching treatments. CONSTITUTION:On one surface 11a provided with ring grooves 14 (14a-c) and formed with a Cu layer 18 by Cu plating of a disk like magnetic material 11, the Cu layer 18 is removed by polishing the surface and the Cu layer 18 is filled in the ring grooves 14 (14a-c). Then, a spiral etching pattern drawing is placed on the Cu layer 18 of the ring grooves 14 (14a-c) and exposed. A coil 16 is formed in each ring groove 14 (14a-c) on the one surface 11a by etching the exposed surface and on the other surface 11b, a wiring material 17 is provided in a through hole 13 (13a, 13b). This forms a rotary transformer 10 which has the coil 16 provided by etching the Cu layer 18.</p> |
