发明名称 PRODUCTION OF MAGNETIC RECORDING MEDIUM
摘要 PURPOSE:To obtain a magnetic recording medium which is provided with both of good sliding durability by a hard carbon film and good surface lubricity by a lubricative carbon film by uniformly forming line ruggedness on the surface of the hard carbon film. CONSTITUTION:A mask adequate for etching to roughen the surface of the hard carbon film can be formed by etching along the grain boundaries of an aluminum film 14 and therefore, the fine ruggedness can be uniformly formed on the surface of the hard carbon film 13. Advantage can be thereby taken of the sliding durability of the hard carbon film 13 and the lubricity of the lubricative carbon film and the magnetic recording medium having the lower contact resistance to a magnetic head is easily obtd. Since the fine ruggedness corresponding to the ruggedness of the hard carbon film 13 is formed on the surface of the lubricative carbon film 15, the contact area with the magnetic head is decreased and the contact area with the magnetic head is decreased and the contact resistance to the magnetic head is decreased.
申请公布号 JPS62219231(A) 申请公布日期 1987.09.26
申请号 JP19860059478 申请日期 1986.03.19
申请人 FUJITSU LTD 发明人 WAKAMATSU HIROAKI;SHINOHARA MASAKI;KUME TOMIO;SAWADA SHIGETOMO;KIUCHI KATSUMI
分类号 C23C14/06;C23C14/04;G11B5/84 主分类号 C23C14/06
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