| 摘要 |
PURPOSE:To prevent a vacuum degree of a vacuum bath from being lowered to enable a sample which is placed outside the vacuum case to be analyzed, by introducing neutral particles, which are generated by making sample gases by laser radiation, through an introduction bath into the vacuum bath, to perform mass spectrography. CONSTITUTION:An introduction shutter 23 is closed and an exhaust shutter 26 is opened so that the insides of the introduction bath 21 and the vacuum bath 24 are kept highly vacuumized. The exhaust shutter 26 is first closed to irradiate a sample 2 with the laser beams 3 emitted from the first laser device 4. Concurrently, the introduction shutter 23 is opened for short time to introduce the neutral particles 7A, which are generated from the sample 2, into the introduction bath 21. Then, the exhaust shutter 26 is opened so that the neutral particles 7A are ionized by the second laser device 10, to become charged particles 7B and perform mass spectrography by a mass spectrograph 8 located inside the vacuum bath 24. Hence, mixture of gaseous molecules into the atmosphere is suppressed to the minimum, and the sample placed outside the vacuum path 24 can be analyzed with high accuracy.
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