摘要 |
PURPOSE:To improve an accuracy of fixing a semiconductor substrate by fixing the semiconductor substrate merely with three sorts of members comprising the semiconductor substrate, an anode main electrode, and a fixed annular ring. CONSTITUTION:Since a direct stacking of three members: i.e. semiconductor substrate 1, fixed annular ring 2, and anode main electrode 5, allows an inwall 32 of the fixed annular ring 2 to fix a sidewall 31 of metal plate 12, and a sidewall 33 of anode main electrode 5, the above structure interrupts a parallel movement of the semiconductor substrate 1. Furthermore, a projecting part 22 of the fixed annular ring 2 is so fitted into a space formed between a project ing part 21 of the metal plate 12 and the recess part 23 of the anode main electrode 5 that such a configuration prevents the semiconductor substrate 1 from rotating.
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