DISPOSITIF MATRICIEL DE DETECTION D'UN RAYONNEMENT LUMINEUX A ECRANS FROIDS INDIVIDUELS INTEGRES DANS UN SUBSTRAT ET SON PROCEDE DE FABRICATION

摘要

The invention relates to a matrix device for the detection of light radiation with individual cold screens integrated into a substrate and to its production process. This device comprises detectors arranged in matrix-like manner and defined in a detection material, a substrate which is transparent to the radiation to be detected and on which is epitaxied the detection material and provided in its upper part with blind holes distributed in matrix-like manner, each hole being positioned facing a detector, a layer of anti-reflecting transparent material covering the bottom of the holes and a layer of a material absorbing the radiation covering the upper face of the substrate and the walls of the holes. The invention more particularly applies to an infrared imaging system.