| 摘要 |
PURPOSE:To prevent dust from being produced due to friction and to make it possible to clean heat a workpiece, by providing a mechanism including a conveyer which floats on an air stream and conveys the workpiece, in a heater. CONSTITUTION:An actuator raises a guide rail 7 to lift up a workpiece 5 on a work loading bed 4 by means of a work carrier bed 3. Then, a carrier member 1 is floated up by an air stream above the guide rail 7, and is moved by one pitch by means of a horizontally moving actuator 10. Thereafter, a vertically moving actuator 8 lowers the guide rail 7 to set the workpiece on the work loading bed 4. Then the carrier member 1 is floated up and returned to its original position, and therefore, the conveyance of the workpiece 5 by one pitch is be completed. With the repetition of the above-mentioned steps, the workpiece 5 may be conveyed. Thus, dust produced in a furnace or therearound may be restrained to be minimum. In particular, such an arrangement may be used for the heating of liquid crystal panels and semiconductor wafer to attain super-clean heating.
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