| 摘要 |
PURPOSE:To perform lapping work with high efficiency by arranging pressure sensors in upper and lower chambers of a pressurizing cylinder and controlling the respective pressures via a servo-mechanism in accordance with a predetermined program. CONSTITUTION:Pressures in an upper chamber 1 and a lower chamber 2 of an air cylinder S for pressurizing a lapping disk are respectively detected with a piezoelectric conversion mechanism 4 and inputted to a central processing mechanism (CPM) 5. The CPM 5 transmits control signals according to a predetermined program as the lapping work goes on to a servo-valve mechanism 3 to regulate pressurized air in pipe passages 1' and 2' either independently or in combination so that a differential pressure between pressures P1 and P2 becomes a specified value. Thus, lapping pressures can be changed continuously variably to perform the lapping work with high efficiency. It is also made possible to constitute optimum lapping programs according to the shape and physical nature of the surfaces of workpieces so that yield of products is improved. |
