| 摘要 |
PURPOSE:To combine plasma with light and to enable high-quality surface treatment in high velocity by using an introduced material to be treated and light introduced through an optical window and furthermore adding gas separately introduced into a treatment chamber thereto. CONSTITUTION:Gas 28 for treating which is fed from a gas feeder is introduced into a ring-like pipe 26 for gas introduction via a valve 27, made to flow toward the center part through many gas injection holes 260 which are bored in the inside of the ring of the ring-like pipe 26, and injected on the surface of a base plate 24. Gas receives an activated species, ions and irradiation of one or all parts of emitted light which are introduced into a treatment chamber 20 from a cylinder 10. Reaction is caused by these energies and prescribed treatment such as deposition of a thin film is performed on the surface of the base plate 24. Further a method for introducing gas 28 for treating is not limited to the method using the ring-like pipe 26 for gas introduction. |
