| 摘要 |
PURPOSE:To make a protective film inert by simultaneously forming the films of a metal and metallic oxide to form the protective film so that the unstable oxygen generated from the metallic oxide in the stage of film formation is trapped by the metal. CONSTITUTION:The underlying protective film 12, optical recording medium layer 13 consisting of TbFeCo, etc. and the upper protective layer 14 consisting of Si, etc., are laminated on a transparent substrate 11. The film 12 is formed by, for example, setting the substrate 1 formed with optical guide grooves in a vacuum deposition device 2, evacuating the inside of the device, heating Tb and SiO2 in two hearths 3, 4 by electron beams 5 and executing vapor deposition at the same instant. The unstable oxygen in the vapor-deposited oxide is trapped by the simultaneously deposited metal according to the above- mentioned constitution and therefore, the stable and transparent film 12 is obtd. |
