PERPENDICULAR MAGNETIC RECORDING MEDIUM AND ITS PRODUCTION

摘要

PURPOSE:To decrease deformation such as curling of a recording medium by forming a soft magnetic layer of a Co alloy compd. having the film stress in the direction reverse from the film stress of a perpendicularly magnetized layer. CONSTITUTION:The soft magnetic layer and the perpendicularly magnetized layer are provided on a substrate consisting of a flexible high-polymer compd. or the like and the Co alloy compd. having the film stress in the direction reverse from the film stress of the perpendicularly magnetized layer is used for the soft magnetic layer. The soft magnetic layer is formed by, for example, a sputtering method using a Co alloy (e.g.: CoCr) for a target in a gaseous nitrogen-contg. atmosphere. The deformation such as curling is decreased and the recording medium having good magnetic characteristics is obtd. according to the above-mentioned constitution.