| 摘要 |
<p>A method of measuring the dimensions of a fine pattern, comprising: detecting (step 705) a surface area and a profile of a displayed pattern image, detecting (707) the center of gravity of the pattern image, calculating (709) an equivalent diameter of a circular pattern having the same surface area as the pattern image, determining (7l3) a mean value of pattern lengths of lines which pass through the center of gravity of the pattern image and which intersect the pattern image at two intersecting points, and comparing (7l5) the mean value with the equivalent diameter of the pattern image. The pattern lengths are defined as distances between the two intersecting points. </p> |
