Improved diamond-like carbon films and process for production thereof.

摘要

improved diamond-like carbon films of improved properties are deposited on various substrates utilizing a plasma assisted chemical vapour transport process (PACVT) process in which hydrogen is employed as the reactive process feedgas and in which the deposition process is conducted in a controllably energetic ion bombardment of the surface on which the films are grown by introducing the hydrogen feedgas into the reactor volume through a porous graphite electrode into a defined plasma geometry.