| 摘要 |
PURPOSE:To symmetrize the sectional shape of laser beams, to simplify structure and to miniaturize a device by mounting a blade member extending over the whole region in the longitudinal direction of a discharge section in said section. CONSTITUTION:A first blade member 25 is elongated extending over the whole region of either longitudinal direction of a pair of electrode holders 23, 24, and second blade members 26, 27 are each protruded also extending over the whole region of the longitudinal direction of both electrode holders 23, 24 at the centers in the cross directions of both electrode holders 23, 24. The first blade member 25 is formed curvedly, and the second blade members 26, 27 are formed to a planar shape. When an assembly A is turned as shown in the arrow of a broken character by a motor, a laser gas is guided to a curved surface in the direction of rotation of the first blade member 25, and flows into a discharge region. Since the discharge region is rotated, using an optical axis as a shaft, the mode pattern of laser beams outputted takes a symmetric shape at that time, thus allowing working with high precision. |
