| 摘要 |
PURPOSE:To make it possible to measure the shape of a surface to be inspected of every kind with high accuracy, by providing a lens for equivalently increasing the number of apertures between a condensing lens and the surface to be inspected in a freely detachable manner and also providing a mechanism for centering said lens to the condensing lens. CONSTITUTION:The centering of a lens holder 32 is performed using a reference spherical surface 60 before the lens holder is mounted prior to measuring a surface to be inspected. In this centering, the output of an image pickup element 14 obtained by applying streak scanning to the wave front reflected from the reference spherical surface 60 is analyzed by a streak analytical part 61 and the centering to the condensing lens 4 of the reference spherical surface 60 is automatically performed on the basis of the output information of said analytical part 61 through a drive part 62. Next, the lens holder 32 is mounted on a condensing lens holder 31 and error information showing the shift of centering is obtained with respect to the wave front obtained by the combination with the reference spherical surface 6 in the streak analytical part 61 and, on the basis of this information, required voltage is applied to the height controller 37 of the condensing lens holder 31 and the lateral shift controller 47 of the lens holder 32 through the drive part 62 to automatically perform the centering of the lens 21 with respect to the condensing lens 4.
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