| 摘要 |
PURPOSE:To directly cool a microwave transmitting window material by providing a cooling jig for directly cooling the material in a waveguide. CONSTITUTION:A cooling jig 7 is composed of a tubular material, so placed as to contact at one end with a microwave transmitting window material 3 by a cooling plate 7a and to pass at the other end through the waveguide wall to an exterior, and coolant is filled in the waveguide. Thus, the material is directly cooled by the cooling jig. The coolant uses cooling water to circulate in a cooling pipe 7 by an external circulating unit. It is most effective to cool the vicinity of the center of the material 3 due to the relation to a thermal distribution on a wafer.
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