发明名称 Semiconductor device
摘要 A semiconductor device, and more particularly a technique for forming the substrate thereof, is provided for the purpose of preventing the occurrence of crystal devects during recrystallization. To accomplish this, while the surface of an insulator on which a material to be recrystallized is flattened, a semiconductor layer which is employed for another use, e.g., the interconnection between elements or the gate electrode of a MOS transistor, is disposed in the insulator. Owing to the flattened insulator, the occurrence of the crystal defects in the recrystallization of the material can be prevented.
申请公布号 US4695856(A) 申请公布日期 1987.09.22
申请号 US19840642258 申请日期 1984.08.20
申请人 HITACHI, LTD. 发明人 WARABISAKO, TERUNORI;OHKURA, MAKOTO;MIYAO, MASANOBU
分类号 H01L27/00;H01L21/3205;H01L23/528;H01L23/532;(IPC1-7):H01L27/12 主分类号 H01L27/00
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