| 摘要 |
PURPOSE:To vary to a barrel type or down-flow type ashing apparatus by providing a plate between a microwave transmitting window and a wafer, and driving it. CONSTITUTION:A microwave generator 11 and a chamber 13 for introducing ashing gas 12 have plasma generating means made of a microwave transmitting window 15 for introducing microwave 14 into a chamber. A plurality of plates having a plurality of holes 20 are provided between the window 15 and a wafer which is coated with resist 16, the plates 18 are driven to control the flow of a plasma 19 which arrives from the window 15 on the wafer 17. Thus, the flow of the plasma is interrupted or passed to readily convert to a down-flow type ashing apparatus of a barrel type ashing apparatus.
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