| 摘要 |
PURPOSE:To make the accurate speed detection of a bonding arm feasible by a method wherein a speed detection generator is connected to one end of a branch arm interlocking with a bonding arm while a voice coil type linear motor lifting and lowering the bonding arm is covered with a magnetic sealing material. CONSTITUTION:When a wedge 11 lands at the specified part of a pellet 3, the wedge 11 is impressed with the specified ultrasonic vibration to make a wire 14 projected from the end of wedge 11 ultrasonic-junction with an electrode part of the pellet 3. Next, the wedge 11 is horizontally shifted to draw out the wire 14 making a loop and then the wedge 11 lands at the specific part of a lead frame 2 to perform the second bonding process by impressing the ultrasonic vibration again. Finally, the surface part of wire 14 is cut off by a clamper 12 holding the wire 14 to finish the wire bonding process. Through these procedures, a voice coil type linear motor 7 is magnetically isolated from a speed detecting generator 22 to make the accurate speed detection feasible. |
