| 摘要 |
PURPOSE:To select freely the position of a rotation center by providing one displacing mechanism with three parallel flexible beam displacing mechanisms and one radial flexible beam displacing mechanism and providing the other with two radial flexible beam displacing mechanisms and a fine adjustable table. CONSTITUTION:A fine positioning device is equipped with the first displacing structure 29 and the second displacing structure 31, and a fine adjustable table 32 is displaced in directions of (x)-(z) axes and is positioned finely. The first displacing structure 29 consists of projecting parts 21a-22b, parallel flexible beam displacing mechanisms 23Fx-25Fy in directions of (x)-(z) axes, and a radial flexible beam displacing mechanism 26Mz in the direction of the (z) axis, and the second displacing structure 31 consists of radial flexible beam displacing mechanisms 33Mx-34My in directions of (x)-(y) axes and rigid body parts 35 and 36. Piezoelectric actuators 23c-34c of displacing mechanisms 23Fx-34My are driven to obtain displacements parallel with respective axes and the rotative displacement at a center P, thus positioning the fine adjustable table 32. |
