| 摘要 |
PURPOSE:To obtain a high-sensitivity sensor which suits to the detection of low-concentration gas and is easily maintained by using a TCNQ complex as a gas sensing part and leading out an electric signal indicating variation in the electric conductivity of the TCNQ complex caused when it contacts gas to be inspected. CONSTITUTION:Counter electrodes 2a and 2b are formed by vapor-depositing Au on a cleaned glass substrate 6 and a gas sensitive thin film 3 is formed of a metal.TCNQ complex (e.g. Cu.TCNQ complex) on their surfaces. This thin film 3 is formed by dispersing fine crystal of the Cu.TCNQ complex pulverized by a ball mill and employing a spin-coating method. For example, when NO2 is used as the gas to be inspected, the sensor 1 is heated in gaseous N2 to desorb water adsorbed to the surface and then heated to specific temperature. A specific voltage is applied between the electrodes 2a and 2b by using a potentiostat, etc., and a fine ammeter is connected in the middle of wiring. Then the sensor is exposed to atmospheric gas and variation of a fine current with the electric conductivity of the thin film 3 is measured to detect the gaseous NO2.
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