| 摘要 |
PURPOSE:To prevent a pressure sensor from breaking and to improve the linearity by suspending the pressure sensor in right-left symmetrical structure in the charged liquid in a static pressure chamber in a suspended state and making higher admitted pressure operate on the charged liquid from two auxiliary chambers. CONSTITUTION:Pressure introduction chambers 4a and 4b are provided on both sides of a body 2, a static pressure chamber 6 is provided at the upper part, and the auxiliary chambers 7a and 7b are provided at the lower part. The introduction chambers 4a and 4b are partitioned into an introduction side and a detection side by partition walls 5a and 5b. The pressure sensor 8 which has a detection chamber 8b partitioned by a detection diaphragm 8c is supported in the charged liquid in the static pressure chamber 6 in the suspended state. The auxiliary chambers 7a and 7b are partitioned into a pressure side and a static pressure side by seal diaphragms 10a and 10b. Then, the detection sides of the introduction chambers 4a and 4b communicate with the input sides of the detection chamber 8b through the pressure sides of the auxiliary chambers 7a and 7b and the static pressure sides of the auxiliary chambers 7a and 7b, on the other hand, communicate with the static pressure chamber 6. Therefore, pressure applied to the introduction chambers 4a and 4b operates on the detection diaphragm 8c and is also applied to the detection chamber 6, thereby preventing the sensor from breaking owing to excessive pressurization.
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