| 摘要 |
PURPOSE:To remarkably shorten a measurement time by providing a readable and writable storage means where data for correction on a measurement error is stored. CONSTITUTION:Glass 1 to be measured is sandwiched between oil on plates 2 and installed on an interferometer 3 and the inclination of a reference plane plate is adjusted over a look at a monitor 7. Then, a desired disk memory 9 is inserted into a disk device, and a process is selected and conditions are set or altered on a keyboard 11 according to the display contents of a display 10. A computer 8 inputs correction data from the memory 9 and inputs interference fringe data from a control part 5 to a buffer memory through an interface. The correction data corresponds to the measurement error based upon the interferometer 3 and plates 2 and is generated in the process of error measurement. The correction data is subtracted from the interference fringe data to calculate a measured quantity indicating the homogeneity of the glass 1. Then, an output format is selected and its measured quantity is stored in the memory 9 or printed out 12.
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