| 摘要 |
PURPOSE:To perform fine positioning quickly and smoothly by using a parallel displacing mechanism having parallel flexible beam parts different in rigidity or a rotative displacing mechanism having radial flexible beam parts. CONSTITUTION:With respect to a fine positioning device, a rigid body part 10 is provided in the center to form a fine adjustable table, and rigid body parts 11a-12b are provided in positions symmetrical to a plane K passing this table to constitute the fine positioning device. Parallel flexible beam displacing mechanisms 19a and 19b connecting rigid body parts 10 and 11a and rigid body parts 10 and 11b are provided between them, and parallel flexible beam displacing mechanisms 20a and 20b different in rigidity from mechanisms 19a and 19b are provided between rigid body parts 11a and 12a and rigid body parts 11b and 12b. Piezoelectric actuators 16a, 16b, 17a, and 17b of parallel flexible beam displacing mechanisms 19a-20b are driven to perform rough positioning and fine positioning, and the positioning precision is improved. Radial flexible beam displacing mechanisms may be used instead of these parallel flexible beam displacing mechanisms to constitute the rotative displacing mechanism. |
