| 摘要 |
PURPOSE:To improve the positioning precision by using a parallel displacing mechanism consisting of symmetrically arranged parallel flexible beam displacing mechanisms or a rotative displacing mechanism consisting of radial flexible displacing mechanisms. CONSTITUTION:A fine positioning device is provided with a rigid body 10 as a fine adjustable table 10 in the center, and rigid body parts 11a-12b are provided in positions symmetrical to a plane K passing this part 10. Parallel flexible beam displacing mechanisms 19a-20a are provided between rigid bodies 10 and 11a, rigid bodies 11a and 12a, rigid bodies 10 and 11b, and rigid bodies 11b and 12b respectively to form a parallel displacing mechanism 21. Piezoelectric actuators 16a-17b of respective displacing mechanisms 19a-20b are driven to position the fine adjustable table finely. Radial flexible beam displacing mechanisms may be used instead of these parallel flexible beam displacing mechanisms to position the table with respect to rotative displacement. |
