发明名称 THIN FILM SEMICONDUCTOR DEVICE
摘要 PURPOSE:To restrict a leakage current to a very small value by opposing two thin film semiconductor layers to serve as channel regions through a dielectric layer, and controlling the formation of the channels in other semiconductor layer by a field effect due to the formation of the channel in one semiconductor layer, thereby enhancing a current blocking power at reversely biasing time. CONSTITUTION:A first semiconductor thin film 12 is insularly formed on an insulating substrate 11 made of glass or the like, and a source region 13 and a drain region 14 are formed at both ends of the film. An insulating film 15 is formed on the film, a second semiconductor thin film is insularly formed on the film, and a source region 17, a drain region 18 and a channel region 16 are formed at both ends of the film. Both the regions 12, 16 are high resistance regions and impurity-undoped polycrystalline silicon layers. On the other hand, the regions 13, 14, 17, 18 are low resistance regions. When an element 1 having the region 12 and an element 2 having the region 16 are connected with a power source V with this configuration, a switch function is obtained by the mutual action between the elements 1 and 2. thus, a voltage applied between the source and the drain when the element is OFF is uniformly distributed on the entire channel region of the high resistance state to be presented.
申请公布号 JPS62214666(A) 申请公布日期 1987.09.21
申请号 JP19860056798 申请日期 1986.03.17
申请人 HITACHI LTD 发明人 HOSOKAWA YOSHIKAZU;KONISHI NOBUTAKE;SUZUKI TAKAYA
分类号 H01L27/12;H01L29/78;H01L29/786 主分类号 H01L27/12
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