发明名称 MANUFACTURE OF SEMICONDUCTOR LASER
摘要 PURPOSE:To enable the single peaking of the transverse mode of outgoing beams by approximately making the side end surface of an active layer perpen dicular to a hetero-interface in an indium phosphite based semiconductor laser in which a light-emitting section is formed in a means structure and a III-V mixed crystal layer mainly comprising In and P is used as the active layer. CONSTITUTION:A first InP layer 2, an active layer 3 mainly comprising In and P and a second InP layer 4 are laminated on a substrate 1 in succession, and sections up to at least the first InP layer 2 from the second InP layer 4 are etched to form a band-shaped mesa structure 6. The active laye 3 is side-etched by an etchant having an etching rate larger than the first and second InP layers 2, 4 to the active layer 3 shaped to a band form and approximately making the etching surface of said active layer 3 perpendicular to the first and second InP 2, 4 layers, thus forming a light-emitting section. Accordingly, the side end surface of the active layer in the light-emitting section is made perpendicular to a hetero-interface, thus effectively working an optical confinement effect in the transverse direction, the allowing the single peaking of the transverse mode of outgoing beams.
申请公布号 JPS62213190(A) 申请公布日期 1987.09.19
申请号 JP19860055406 申请日期 1986.03.13
申请人 FUJITSU LTD 发明人 KUSUKI TOSHIHIRO
分类号 H01L21/308;H01L21/306;H01S5/00 主分类号 H01L21/308
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