发明名称 AIRTIGHT VESSEL FOR CONVEYANCE OF SUBSTANCE TO BE TREATED PROVIDED FOR TREATMENT IN PURIFIED ENVIRONMENT
摘要 PURPOSE:To improve the airtightness of an airtight vessel for conveyance by a construction wherein airtight sealing of a box-shaped member and a cap- shaped member is attained by an annular elastic air bag and the air bag can be pressed in accepting grooves. CONSTITUTION:In a state in which a cap-shaped member 2 is made to engage with the inside of an opening edge 3 of a box-shaped member 1, a nozzle 11 is made to face an inlet-outlet 8, and a pressurized gas is injected into an air bag 7 through the inlet-outlet. Then the air bag 7 is inflated to protrude outside the outer periphery of the cap-shaped member 2 and to contact with the inner periphery of the opening edge 3. When the pressurized gas is injected further, the air bag 7 is pressed on the inner periphery and further into an accepting groove 5, the annular elastic air bag 7 is put consequently in state in which the outside thereof is pressed in the accepting groove 5 and the inside thereof in an accepting groove 6, and thereby the box-shaped member 1 and the cap- shaped member 2 are put in a coupled state. The pressurized gas injected in the air bag 7 is maintained by a valve mechanism 9 and others, and thus a vessel can be moved in a state in which a space S is isolated airtightly.
申请公布号 JPS62213138(A) 申请公布日期 1987.09.19
申请号 JP19860055799 申请日期 1986.03.13
申请人 TAISEI CORP 发明人 CHINO NOBUO
分类号 H01L21/673;H01L21/67;H01L21/68 主分类号 H01L21/673
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