| 摘要 |
<p>PURPOSE:To purify silicon hydride with improved adsorptivity, by treating silicon hydride containing PH3 with an adsorbent obtained by exchanging cations of zeolite having specific constituent components with a bivalent cation. CONSTITUTION:All or part of exchangeable cations of synthetic or natural zeolite, containing SiO2 and Al2O3 as constituent components and having >=5 molar ratio (SiO2/Al2O3) of the contained SiO2 to Al2O3 are exchanged with a bivalent cation, e.g. Mg, Ca, etc., and the resultant zeolite is heat-treated at 200-600 deg.C in an inert gas, e.g. nitrogen, etc., to afford the aimed adsorbent, which is then reacted with silicon hydride, e.g. SiH4, in a vapor phase state, expressed by the formula (n is 1-4) and containing <=1wt% PH3 at -80-0 deg.C under pressure, etc., to adsorb and remove the PH3 and purify the SiH4, etc.</p> |
