| 摘要 |
PURPOSE:To form an optical waveguide which is free from abnormalities such as deformation and crack by forming an optical waveguide consisting of a metallic layer on an Li2B4O7 crystal substrate and heating the substrate to <=775 deg.C to diffuse the metal of the metallic layer into the Li2B4O7 crystal sub strate. CONSTITUTION:The optical waveguide pattern consisting of the metallic layer 2 is formed on the dielectric Lid2B4O7 crystals substrate 1 by using a thin film forming technique such as vacuum depositiion or sputtering and lithographic technique. The Li2B4O7 crystal substrate 1 formed with the pattern of the metal lic layer 2 is then heated to thermally diffuse the metal of the metallic layer 2 to the Li2B4O7 crystal substrate 1, by which the optical waveguide 3 is formed. The thermal diffusion of the metal of the metallic layer 2 is execute by maintaining the diffusion temp. at <=775 deg.C, by which the diffusion of the metal is executed with no abnormalities such as deformation and cracking at all in the Li2B4O7 crystal substrate 1 itself and the optical waveguide 3 having good quality is formed. |
