发明名称 Device for the support and/or the electrical connection of a load inside a furnace for heat treatment by ion bombardment, and structure used for the said device as a support and/or for passing current
摘要 The device according to the invention comprises a plurality of horizontal bars 11 made from an electrically conductive material such as graphite and each carrying at least one rod 14, made from a material such as molybdenum, which extends longitudinally on the upper face of the bar 11, projecting slightly with respect to the latter, and at least one structure 12 for supporting the said bars, this structure comprising means for mechanical assembly and electric insulation with respect to the lower part of the enclosure of the furnace, as well as means for electrical connection of the said bars 11 and/or the said rods 14 with an electric circuit 16. The invention is applied in particular to furnaces for treatment by ionic bombardment which operate high temperature. <IMAGE>
申请公布号 FR2595799(A1) 申请公布日期 1987.09.18
申请号 FR19860003486 申请日期 1986.03.12
申请人 INNOVATIQUE SA 发明人 FRANCK RIBET
分类号 C21D1/773;C23C8/36;F27B17/00;F27D5/00;F27D99/00;H01J37/32;H01L21/00;H01L21/687;(IPC1-7):F27B3/08;F27D11/10 主分类号 C21D1/773
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